The assignment:
The objective of this project is to design a surface machining fabrication lay out for a MEMS torsional micromirror using the SANDIA SUMMiT V fabrication process and design tools.
Using the SANDIA SUMMiT V design and visualization tools, design the surface micromachning lay out for the torsional micromirror shown in the attached Power Point file. The micromirror should contain etch holes, dimples…etc as necessary. The accompanying Power point file (located on the S-drive) displays the mirror’s geometry and needed information.
My early model:
where is the powerpoint slide
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